Equivalent circuit consideration of frequency-shift-type acceleration sensor

摘要

In this paper, an electrical equivalent circuit for the piezoelectrically driven frequency-shift-type acceleration sensor model is represented, and the equivalent circuit constants including the effect of the axial force are clarified for the first time. The results calculated by the finite element method are compared with the experimentally measured ones of the one-axis sensor of trial production. The result shows that the analyzed values almost agree with the measured ones, and that the equivalent circuit representation of the sensor is useful for electrical engineers in order to easily analyze the characteristics of the sensors. (C) 2018 The Japan Society of Applied Physics