Improvement of the Information depth in In-depth Analysis by Radio-frequency-powered Glow discharge Optical Emission spectrometry

摘要

Two novel measuring methods in radio-frequency-powered glow discharge optical emission spectrometry: an amplitude modulation technique and a bias-current conduction technique, are reviewed. They are both effective for the ion-depth analysis of relatively thin films. In the amplitude modulation technique, radio-frequency voltages supplied to the glow discharge lamp are modulated at a very low frequency, which leads to a reduction In the sputtering rate as well as a cyclic variation in the emission signal.