Control of a batch-processing machine: a computational approach

摘要

Batch processing machines, where a number of jobs are processed simultaneously as a batch, occur frequently in semiconductor manufacturing environments, particularly at diffusion in wafer fabrication and at burn-in in final test. In this paper we consider a batch-processing machine subject to uncertain (Poisson) job arrivals. Two different cases are studied: (1) the processing times of batches are independent and identically distributed (IID), corresponding to a diffusion tube; and (2) the processing time of each batch is the maximum of the processing times of its constituent jobs, where the processing times of jobs are IID, modelling a burn-in oven.