机译:半导体制造中使用多属性决策的多目标动态调度方法
Department of Industrial Engineering & Logistics Management, Shanghai Jiao Tong University, 800 Dong Chuan Rd, Min Hang District, 200240 Shanghai, China;
Department of Industrial Engineering & Logistics Management, Shanghai Jiao Tong University, 800 Dong Chuan Rd, Min Hang District, 200240 Shanghai, China;
Department of Industrial Engineering & Logistics Management, Shanghai Jiao Tong University, 800 Dong Chuan Rd, Min Hang District, 200240 Shanghai, China;
Shanghai Huali Microelectronics Corporation, 201210 Shanghai, China;
Department of Industrial Engineering & Logistics Management, Shanghai Jiao Tong University, 800 Dong Chuan Rd, Min Hang District, 200240 Shanghai, China;
Dynamic scheduling; Multi-objective optimization; Multiple attribute decision making (MADM); Semiconductor manufacturing system; (SMS);
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