A NOVEL METHOD GUIDING IC MANUFACTURING R&D DIRECTION: PERSPECTIVE FROM KNOWLEDGE INTEGRATION INNOVATION

摘要

Integrated circuit (C)manufacturing involves complex processes and mayrequire months to complete. Thousands of messages will be generated during each processand most messages can easily be identified and analyzed. However, ambiguous information remains as a kind of tacit knouledge that is one of the most essential issues of REDmanagement. Integrated innouation is an application of scientific/technological creativesolutions to complex processes. This research uses a case study of a semiconductor company in Hsinchu Science Park in northern Taiwan. Traditional methods only yield theresults inferred from explicit knowledge, and omit the results based on tacit knouledgeThe integrated method can be designated as a clear direction for the RED which usesthe multivariate statistical analysis as virtual sensors. By involving Hotelling T2, andthe principal component analysis (PCA ), to generate specific results corresponding to thecore of the high density plasma chemical vapor deposition(HDP CVD)equipment orprocess, eliminate inaccurate information using the experience rating in a 12-inch fabThis provides an approach that can guide the RED engineers and illuminate the entireprocess. In sum, both process stabilization and cost savings are the major advantages ofvirtual sensors.