A novel multilayer metal membrane has been developed that can be used for the separation of ultra-high purity hydrogen from impure feed streams. The membrane is comprised of very thin layers of dense palladium film deposited on both sides of a thin Group V metal foil, ion-milled prior to the deposition of the palladium. This membrane operates at elevated temperatures on the order of 300 deg. C and is capable of high rates of hydrogen flow.
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