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机译:用于纳米加工的机上光学表面轮廓测量系统
Precision and Intelligence Laboratory, Tokyo Institute of Technology 4259 Nagatsuta, Midori-ku, Yokohama, Kanagawa 226-8503, Japan;
Precision and Intelligence Laboratory, Tokyo Institute of Technology 4259 Nagatsuta, Midori-ku, Yokohama, Kanagawa 226-8503, Japan;
Precision and Intelligence Laboratory, Tokyo Institute of Technology 4259 Nagatsuta, Midori-ku, Yokohama, Kanagawa 226-8503, Japan;
Precision and Intelligence Laboratory, Tokyo Institute of Technology 4259 Nagatsuta, Midori-ku, Yokohama, Kanagawa 226-8503, Japan;
Department of Mechanical Engineering, Keio University 3-14-1 Hiyoshi, Kohoku-ku, Yokohama, Kanagawa 223-8522, Japan;
metrology and measurement; on-machine shape measuring system; nano-machining; optical stylus; astigmatic method;
机译:用于测量镜面轮廓的光学三角测量系统分析
机译:研磨过程中大光学表面轮廓测量的摆臂机上检查方法
机译:开发用于小型光学零件的458倾斜机上测量系统
机译:非球面磨削表面的机床轮廓测量系统
机译:带有倾斜测量便携式光学测试系统的高分辨率光学表面计量学。
机译:用于测量平面位置和倾斜方向的光学传感器
机译:基于自动立体检查的微结构表面三维机上测量系统
机译:用于测量有毒化学品环境归趋的实验室蒸发和解吸仪器系统(风洞):速度剖面与地球表层剖面的比较