Grey theory applied to evaluate the tribological performances of the a-C:H(N) coating films prepared by differing the nitrogen content and the film thickness

摘要

The purpose of this paper is to study the tribology performances of the aC:H(N) films by using a nanotester under different scratch loads and velocities. From the measurements of the friction coefficient and wear volume, the tribological performances including wear resistance and friction coefficients were evaluated for the hydrogenated amorphous carbon films prepared by differing film thickness and nitrogen volume friction in the gas mixture of (C2H2+N2). Taguchi experimental design and the grey relational analysis were used to investigate the influence of specimen parameters (film’s thickness, nitrogen content in the film), and operating conditions in tribological tests (scratch load and scratch velocity) on the friction coefficients and the wear volume arising in the specimens with different coating films. It is found that the wear volume of thin film is increased by increasing either the nitrogen volume fraction or film thickness. Moreover, the optimal combination of the testing parameters was also determined in the use of the present model.