An Elegant Post-Growth Process Science Protocol to Improve the Material Properties of Complex Oxide Thin Films for Tunable Device Applications

摘要

We report on an innovative isothermal post-growth/crystallization process that utilizes ultraviolet (UV)-photon irradiation. We fabricated Ba_1-xSr_xTiO₃ (BST) thin films using metalorganic solution deposition (MOSD) and UV-photon irradiation isothermal treatment via two protocols: in situ crystallized UV-photon irradiated films, and post-crystallization UV-photon irradiated films. Isothermal UV-photon irradiation treatment improves the structural quality of the BST films, and the irradiated films possessed lattice parameters close to the bulk values, which is evidence for a reduction in oxygen vacancies. MOSD fabricated BST films crystallized via conventionally furnace annealing and subsequently exposed to UV-photon irradiation possessed improved structural, dielectric, and electrical quality.View full textDownload full textKeywordsBST, phase shifter, microwave devices, thin film processing, UV-photon irradiation, dielectric loss, material property balanceRelated var addthis_config = { ui_cobrand: "Taylor & Francis Online", services_compact: "citeulike,netvibes,twitter,technorati,delicious,linkedin,facebook,stumbleupon,digg,google,more", pubid: "ra-4dff56cd6bb1830b" }; Add to shortlist Link Permalink http://dx.doi.org/10.1080/10584587.2011.574982