Temperature controlled oven for low noise measurement systems [for electromigration characterization]

摘要

Low-frequency noise (LFN) measurements are often applied to the characterization of electron devices. When such measurements have to be performed on electronic components maintained at a given temperature, the thermal stability of the oven which is used for this purpose becomes a major concern, because of the high sensitivity of electron devices to temperature fluctuations (TF's). In this paper, we present the realization of a high-stability temperature-controlled oven, purposely designed for the characterization of electromigration in metal interconnections of integrated circuits by means of low-frequency noise measurements. The prototype which has been realized demonstrates that the contribution of the thermal fluctuations of the oven to the background noise of the measurement system is negligible down to frequencies as low as 10 mHz in the entire range of operating temperatures (25-250/spl deg/C).