Formation of a Crystalline Phase during Mechanochemical Surface Treatment of Quartz Glass

摘要

A crystalline phase has been shown to form during mechanical and chemical surface treatments of quartz glass, which shows up as a sharp peak near 85 cm(-1) in the Raman spectrum of the material. Chemical etching of a ground surface of quartz glass is accompanied by the formation and growth of H8Si8O12 microcrystals located deep in the surface layer, which are responsible for structural inhomogeneities in the surface layer of quartz glass and can increase internal friction in it, which should be taken into account in designing processes for the fabrication of high-Q quartz glass resonators.