Optimization of corrugated-QWIPs for large format, high quantum efficiency, and multi-color FPAs

摘要

Previously, we demonstrated a large format 1024 x 1024 corrugated quantum well infrared photodetector focal plane array (C-QWIP FPA). The FPA has a cutoff at 8.6 μm and is BLIP at 76 K with f/1.8 optics. The pixel had a shallow trapezoidal geometry that simplified processing but limited the quantum efficiency QE. In this paper, we will present two approaches to achieve a larger QE for the C-QWIPs. The first approach increases the size of the corrugations for more active volume and adopts a nearly triangular pixel geometry for larger light reflecting surfaces. With these improvements, QE is predicted to be about 35% for a pair of inclined sidewalls, which is more than twice the previous value. The second approach is to use Fabry—Perot resonant oscillations inside the corrugated cavities to enhance the vertical electric field strength. With this approach, a larger QE of 50% can be achieved within certain spectral regions without using either very thick active layers or anti-reflection coatings. The former approach has been adopted to produce two FPAs, and the preliminary experimental results will be discussed. In this paper, we also describe using voltage tunable detector materials to achieve multi-color capability for these FPAs.