This paper reports the experimental results of the development of a novel capacitive divider for high-voltage pulse measurements. The low-voltage (LV) arm capacitor was prepared by thermally growing silicon oxide on commercially available silicon wafers to form capacitors of very large capacitance per unit area (<10 nF with 2 /spl mu/m oxide thickness on a 30 mm-diameter wafer). With the proposed design for LV arm capacitance, divider ratios of the order <10000 can easily be obtained.
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机译：本文报告了开发用于高压脉冲测量的新型电容分压器的实验结果。低压（LV）臂电容器是通过在商用硅片上热生长氧化硅以形成每单位面积的电容非常大的电容器（<10 nF，氧化膜厚度为2 / spl mu / m，直径为30 mm）而制备的。晶圆）。利用建议的低压臂电容设计，可以轻松获得<10000量级的分压比。
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