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GaAs and InP single crystal growth and their characterisation

机译:GaAs和InP单晶生长及其表征

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GaAs and InP single crystals are grown using Liquid Encapsulated Czochralski (LEC) technique as ingots, then cut as wafers and polished for the fabrication of devices. The important crystal characteristics such as resistivity, carrier concentration, mobility and the presence of sub-band levels have been studied using various electrical and optical measurements. The structural analysis has been carried out using etching and X-ray topography. For the realisation of metal-semiconductor contacts, Ag, Al and Au Schottky barrier diodes (SBDs) were fabricated and characterised using current-voltage (Ⅰ-Ⅴ), capacitance-voltage (C-V) and deep level transient spectroscopy. A test solar cell has been fabricated on our GaAs crystal and the efficiency of the cell has been determined to be 14.8% as compared to the 17% of the commercial GaAs solar cells. The polished samples are used for liquid phase epitaxial growth. Very good binary and ternary layers are grown on the pBN grown semi-insulating GaAs samples using Liquid Phase Epitaxial technique. High energy and low energy ion implantation studies were carried out using various ions and the results will be presented. Laser Raman studies were carried out on the implanted samples to understand the crystallisation mechanism. Results obtained on the fabrication of p-InP/ITO, p-InP/CdS solar cell device structures will be discussed.
机译:GaAs和InP单晶使用液态封装的Czochralski(LEC)技术生长为晶锭,然后切割成晶圆并抛光以制造器件。已使用各种电学和光学测量方法研究了重要的晶体特性,例如电阻率,载流子浓度,迁移率和子带能级。使用蚀刻和X射线形貌进行了结构分析。为了实现金属-半导体接触,制造了Ag,Al和Au肖特基势垒二极管(SBD),并利用电流-电压(Ⅰ-Ⅴ),电容-电压(C-V)和深能级瞬态光谱进行了表征。已在我们的GaAs晶体上制造了一个测试太阳能电池,其电池效率确定为14.8%,而商用GaAs太阳能电池的效率为17%。抛光的样品用于液相外延生长。使用液相外延技术在pBN生长的半绝缘GaAs样品上生长非常好的二元和三元层。使用各种离子进行了高能和低能离子注入研究,并将介绍结果。对植入的样品进行了激光拉曼研究,以了解其结晶机理。将讨论在制造p-InP / ITO,p-InP / CdS太阳能电池器件结构中获得的结果。

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