Applications of Micro Electro Mechanical Systems in Microwave Circuits and Systems

摘要

Micro electromechanical structures (MEMS) technology have facilitated innovative approaches in the design and development of effective and low cost microwave circuits and systems. This technology is expected to have significant application in the development of reconfigurable systems and architectures. This paper presents an overview/review of the evolution of MEMS based subsystems and devices, specifically switches, transmission lines, filters, phase shifters and antennas. This paper also discusses the key issues in the analysis and the design of MEMS based devices, popularly called RF MEMS with primary emphasis on MEMS switches.