Mechanical Fracture of Piezoelectric Single Crystal Chip Resonator due to High Input Powere

摘要

Using LiTaO_3 and LiNbO_3 single crystals, we wish to miniaturize a powerful ultrasonic vibrator. We studied the method of measuring mechanical fractures of resonators with good reproducibility and collected data on mechanical fractures of crystals due to high input electric power. Chip resonators with a 4 MHz and 8 MHz shear mode were selected for the test samples.