Er_(0.45)Y_(1.55)SiO_5結晶導波路における導波特性の評価

摘要

Er_(0.45)Y_(1.55)SiO_5 crystal fabricated by Radical-assisted sputtering showed PL fine structure related to Er_2SiO_5 crystal. And we made Er_(0.45)Y_(1.55)SiO_5 crystalline waveguide and evaluated its wave-guiding property of pumping light at a wavelength of 1480nm. It is estimated the loss coefficient of the waveguide was 174cm~(-1). Compared with waveguides prepared by sol-gel method previously reported, the loss coefficient of the waveguide made by RAS was about 100cm~(-1) smaller than that of ones by sol-gel method. Therefore, we have succeeded in suppressing scattering loss contributed by Er_(0.45)Y_(1.55)SiO_5 crystallite grain.%Radical-Assisted Sputtering法を用いて作製したEr_(0.45)Y_(1.55)SiO_5結晶は，Er_2SiO_5結晶に由来する発光スペクトルを示した．作製したEr_(0.45)Y_(1.55)SiO_5結晶へ導波路構造の応用を行ったところ，波長1480nmの励起光導波損失は174cm~(-1)と推定された．これはsol-gel法で作製した試料と比較して102cm~(-1)程度小さい値であり，作製方法の変更により散乱損失が大幅に抑制された．