High Voltage and High Resolution Surface Potential Imaging using Scanning Electrostatic Force Microscope

摘要

A newly developed technique for high voltage surface potential imaging having high resolution capability using Scanning Electrostatic Force Microscope (SEFM) is described. It can measure both electrostatic surface potential distribution of several hundred volts on the dielectric film and topography independently and simultaneously in high resolution of some tens of μm, in the air, quantitatively and without affecting charge distribution.