A multiple imaging system using holographic optical elements for excimer laser machining

摘要

We propose a novel excimer laser machining using a multiple imaging system employing a holographic optical element (HOE). The multiple imaging system can generate many images from one mask pattern. The HOEs that we used were com- puter generated phase holograms. We calculated the HOE by with the following three-step optimization using a direct binary search algorithm, 1)high effi- ciency enhancement step, 2)uniforming step and 3)noise reduction step.