La_(0.5)Sr_(0.5)CoO_3の放電カソード材料としての電気特性

摘要

The La_(0.5)Sr_(0.5)CoO_3 was used as a cathode for the first time when the plasma display panel was used on the handheld personal computer. It has favorable sputtering resistance characteristic and stable discharge characteristic in gases. In this report, the electrical characteristics of the La_(0.5)Sr_(0.5)CoO_3 was investigated through an analysis of the DC plasma panel which was made as prototype. The dimensions of the test plasma panel were measured exactly by the end-measuring machine, and its electric properties were estimated. On the analysis of the DC plasma panel, LaB_6 and metal Ni cathode were investigated in the same way, and the comparative analysis was carried out. From the analysis in sputtering experiment that was conducted in the AC-type sputtering apparatus, the sputter rate of La_(0.5)Sr_(0.5)CoO_3 is greater than the LaB_6's one, while the sputter rate of La_(0.5)Sr_(0.5)CoO_3 that is used as a cathode, is smaller than others. The La_(0.5)Sr_(0.5)CoO_3 has larger secondary-emission coefficient γ than LaB_6 or metal Ni. It was presumed that La_(0.5)Sr_(0.5)CoO_3's larger secondary-emission coefficient γ reduce the sputter rate when it is used as a cathode.%気体放電を使用した表示装置であるプラズマディスプレrnイ（PDP: Plasma Display Panel）は小型軽量で薄く，しかrnも表示品位に優れた表示装置であったため，ブラウン管以rn外のコンピュータ表示装置として，小型コンピュータに初rnめて使用された。