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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Propagation of longitudinal leaky surface waves under periodic SiO/sub 2//Al structure on Li/sub 2/B/sub 4/O/sub 7/ substrate
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Propagation of longitudinal leaky surface waves under periodic SiO/sub 2//Al structure on Li/sub 2/B/sub 4/O/sub 7/ substrate

机译:在Li / sub 2 / B / sub 4 / O / sub 7 /衬底上周期性SiO / sub 2 // Al结构下纵向泄漏表面波的传播

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摘要

The properties of longitudinal leaky surface waves (LLSW) under a periodic SiO/sub 2//Al structure on Li/sub 2/B/sub 4/O/sub 7/ (LBO) substrate, were investigated theoretically and experimentally, in order to improve the high propagation losses of LLSWs under a periodic Al grating with the normalized thickness over 2%. In the theoretical analysis, the previously presented method based on the boundary integral equations for the periodic metal grating structure on the substrate was extended to include the dielectric layer. In the experiments, devices with Al electrodes recessed into a SiO/sub 2/ groove on LBO were fabricated, and the propagation losses of them were estimated. As a result, it was shown that, when the surface of the structure was flattened, the propagation losses were sufficiently low and the first Bragg stopband width decreased.
机译:从理论上和实验上依次研究了Li / sub 2 / B / sub 4 / O / sub 7 /(LBO)衬底上周期性SiO / sub 2 // Al结构下的纵向泄漏表面波(LLSW)的特性。以改善归一化厚度超过2%的周期性Al光栅下LLSW的高传播损耗。在理论分析中,先前提出的基于边界积分方程的基底上周期性金属光栅结构的方法被扩展为包括介电层。在实验中,制造了具有在LBO上的SiO / sub 2 /凹槽中凹陷的Al电极的器件,并估计了它们的传播损耗。结果表明,当结构的表面平坦时,传播损耗足够低并且第一布拉格阻带宽度减小。

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