Full-circular surface acoustic wave excitation for high resolution acoustic microscopy using spherical lens and time gate technology

摘要

With a fixed gate width under the condition where the focus of an acoustic lens was set inside the sample, we varied signal taking-in time. Discrimination was made between differences in time required for an ultrasonic signal reflected from the sample to reach the acoustic lens. This process also enabled three types of images to be obtained separately: the surface reflection wave image, a combination of images based on the interference of the surface reflection wave with surface acoustic waves, and the surface acoustic wave image. Thus it was presumed that this process also would reveal the causes of image contrast and allow an easy interpretation of images. Furthermore, the image resolution was improved, because the surface acoustic wave image was drawn by an ultrasonic beam produced by full-circular surface acoustic wave excitation propagating toward the center converging concentrically; the theoretical resolution was 0.4 times the value of the surface acoustic wave wavelength /spl lambda//sub R/ and independent of the defocus value of the acoustic lens. Several kinds of samples were observed with this method. The results showed that the new method permitted observation of the internal structures of samples while offering new knowledge through the data reflecting the ultrasonic wave damping and scatter drawn on the display.