Modeling, analysis, simulation, scheduling, and control ofsemiconductor manufacturing systems: A Petri net approach

摘要

This paper presents a Petri net approach to modeling, analysis,nsimulation, scheduling, and control of semiconductor manufacturingnsystems. These systems can be characterized as discrete event systemsnthat exhibit sequential, concurrent, and conflicting relations among thenevents and operations. Their evolution is dynamic over time. The systemncomplexity is tremendous owing to the complex semiconductornmanufacturing processes and test procedures. A formal approach such asnPetri nets enables one to describe such complex discrete event systemsnprecisely and thus allows one to perform both qualitative andnquantitative analysis, scheduling and discrete-event control of them.nThis paper also serves as a tutorial paper. It briefly reviewsnapplications of Petri nets in semiconductor manufacturing automation. Itnthen introduces definitions and concepts of Petri nets. It proceeds withna discussion of basic Petri net modules in system modeling, a modelingnmethod and a practical system's modeling example. Next, the papernpresents their properties and their implications in manufacturingnsystems, as well as their analysis methods. Timed Petri nets arenintroduced for system simulation, performance evaluation, and schedulingnpurposes. An application-oriented case study is presented. Finally, thenpaper concludes with the active research areas in applying Petri nets tondesign of semiconductor manufacturing systems