Economical clean dry air system for closed manufacturing system

摘要

We demonstrated that the organic carbon contaminants influencednthe J-E characteristics of a gate oxide. Molecular-contamination-freenclean dry air (CDA) is a choice for the atmosphere control in a closednmanufacturing system. The adsorption and desorption characteristics,nwhich are important items for the design and operation of CDA productionnplants, were confirmed with both a dynamic simulation and a pilotncolumn. Based on the results, we built a CDA plant with a capacity ofn4000 m3/h, and confirmed that each contaminationnconcentration was less than 10 ppb. We also proposed the economical CDAnsystem using a power recycle device which has been newly developed.nUsing this CDA system, it is possible to reduce the power consumption innthe CDA plant. Also, it is possible to realize the circulation of thenused CDA without generating more contamination or powernconsumption