Experimental Study on Static and Dynamic Characteristics of Ga₂O₃ Schottky Barrier Diodes With Compound Termination

摘要

In this letter, the ultrafast reverse recovery beta-Ga2O3 Schottky barrier diode (SBD) with improved breakdown voltage is proposed and investigated experimentally. It features the compound termination, consisting of air space field plate and thermal oxidation terminal. The compound termination not only reduces high-density interface states at the dielectric/Ga2O3 interface and the electron concentration in the oxidation terminal, but also modulates the electric-field distribution and suppresses the peak electric-field at the bottom of anode. Therefore, the reverse leakage current is suppressed as well as the reverse recovery and breakdown characteristics are improved effectively. The Ga2O3 SBDs with the diameter of 1000 mu m obtain ultrashort reverse recovery time of 7.5 ns and ultralow reverse recovery charge of 1.0 nC at di/dt = 50 A/mu s with its breakdown voltage up to 400 V, maintaining good rectification characteristics. The temperature-dependences of both forward conduction and reverse recovery characteristics are discussed in temperature range from 300 to 500 K. The results prove that the superior electronics performance of the beta-Ga2O3 SBDs with good electronics thermal tolerance can overcome the low thermal conductivity of beta-Ga2O3 to a certain extent. The fabricated beta-Ga2O3 SBDs have great potential for high power and high-frequency applications.