Vertically oriented carbon nanofiber based nanoelectromechanical switch

摘要

We present a proof-of-principle study of a vertically aligned carbon nanofiber switch and study relevant parameters via a model for a static switch. Vertically aligned freestanding carbon nanofibers are produced by plasma-enhanced chemical vapor deposition (PECVD) and their deflection under applied voltage is measured using an optical microscope. The deflection is compared with a static force balance model, which successfully predicts the switching behavior assuming a nanofiber modulus of 40 GPa, which is consistent with independent modulus measurements made in our laboratory. The model is then extended to explore constraints for implementing a vertically aligned nanotube switch into present CMOS process flow. Carbon nanofibers of less than 40 nm in diameter, which may be grown by current PECVD technology, are shown to be acceptable for device integration for current and future CMOS scaling. To accommodate varying tube sizes and architectures, a basic scaling relationship is developed to relate CMOS via parameters and nanofiber characteristics to programming voltage.