The effects of the sputtering conditions on bismuth doped gadolinium iron garnet films

摘要

The effects of sputtering conditions on the magnetic and magnetooptic properties of bismuth-substituted gadolinium-iron-garnet (GdIG) films were studied. GdIG films with uniaxial perpendicular anisotropy and room-temperature coercivities greater than 1 kOe were deposited on glass substrates by RF magnetron sputtering. These films have Faraday rotations ( theta /sub f/) between 0.6 degrees / mu m and 1.3 degrees / mu m and temperature-dependent coercivities similar to those of rare earth-transition metal alloys. Increasing the RF power or argon bleeding pressure results in an increase in the compensation temperature with little change in the Curie temperature (T/sub c/). A negative substrate bias lowers T/sub c/, lowers theta /sub f/, and raises the crystallization temperature.