Mo-Re superconducting thin films by single target magnetron sputtering

摘要

The authors prepared Mo/sub 60/Re/sub 40/ thin films by single target magnetron sputtering. All the films analyzed exhibited a sharp superconductive transition and values of the critical temperature T/sub c/ up to 13 K were achieved. Structural analyses (EDS and X-rays) were performed on the samples. A15 phase was obtained even at low deposition temperatures. From the measured low temperature resistivity O/sub c/ and critical temperature T/sub c/ an estimate of the theoretical BCS surface resistance is inferred and compared with that of niobium.