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Fabrication of 30 nm Thick Superconducting BiSrCaCuO Thin Films by Single-Target Magnetron Sputtering Method

机译：单靶磁控溅射法制备30nm厚超导双薄膜薄膜

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Masatsugu Kaise; Kazuo Saito;
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年度 1993
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1. Fabrication and characterization of SmCo5/Nb ferromagnetic/superconducting hybrid thin films grown by RF magnetron sputtering technique [J] . E. Ongun, M. Kuru, M. Serhatl?o?lu, Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology . 2017,第期

机译：SMCO / NB铁磁性/超导杂交薄膜由RF磁控溅射技术生长
2. Fabrication of Superconducting MgB_2 Thin Films by Magnetron co-Sputtering on (001) MgO Substrates [J] . Savio Fabretti, Patrick Thomas, Markus Meinert, Journal of Superconductivity and Novel Magnetism . 2013,第5期

机译：磁控共溅射在（001）MgO衬底上制备超导MgB_2薄膜
3. MgB2 superconducting thin films sequentially fabricated using DC magnetron sputtering and thermionic vacuum arc method [J] . S. Okur, M. Kalkanci, S. Pat, Physica, C. Superconductivity and its applications . 2007,第1a2期

机译：直流磁控溅射和热电子真空电弧法相继制备的MgB2超导薄膜
4. Fabrication of (Cu,C)Ba_2CuO_y superconducting thin film by RF magnetron sputtering [C] . Hiroki Wakarnatsu, Takafumi Ogata, Naohiro Yamaguchi, European Conference on Applied Superconductivity;EUCAS'05 . 2005

机译：射频磁控溅射制备（Cu，C）Ba_2CuO_y超导薄膜
5. Characterization of GaN thin films grown by RF Magnetron Sputtering for fabrication of an AlGaN/GaN HEMT biosensor [D] . Garza, Rocio Yolanda 2014

机译：射频磁控溅射生长的GaN薄膜的特性用于制造AlGaN / GaN HEMT生物传感器
6. Fabrication of Nanopillar Crystalline ITO Thin Films with High Transmittance and IR Reflectance by RF Magnetron Sputtering [O] . Ling Dong, Guisheng Zhu, Huarui Xu, 2019

机译：射频磁控溅射制备高透射率和红外反射率的纳米柱状结晶ITO薄膜
7. Fabrication of superconducting MgB2 thin films by magnetron co-sputtering on (001) MgO substrates [O] . Fabretti, Savio, Thomas, Patrick, Meinert, Markus, 2010

机译：磁控管制备超导mgB2薄膜在（001）mgO衬底上共溅射

Fabrication of 30 nm Thick Superconducting BiSrCaCuO Thin Films by Single-Target Magnetron Sputtering Method

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