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An integrated micropermeameter for soft magnetic microstructures measurements

机译:集成的微渗透仪,用于软磁微结构测量

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A prototype of integrated micropermeameter has been achieved, using the batch process on silicon wafers developed for the fabrication of magnetic heads for helical scan recorders. Measuring the inductance of the integrated solenoids as a function of the frequency gives information on the effective permeability of the magnetic microstructure. This component can be used as a local magnetic material characterization tool, it can also be used as an inductive passive component with possible adjustment of its frequency range by the demagnetizing factor.
机译:使用针对螺旋扫描记录仪的磁头制造而开发的硅晶片上的批处理工艺,已经实现了集成式微渗透仪的原型。通过测量集成螺线管的电感随频率的变化,可以得出有关磁微结构有效磁导率的信息。该组件可以用作局部磁性材料表征工具,也可以用作感应无源组件,并可以通过消磁因子对其频率范围进行调整。

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