Study on S- and R-block construction with additional spinel blocks in sputter-deposited Ba ferrite films

摘要

Ba ferrite sputtered films deposited using the sputtering gas of Xe-Ar-O/sub 2/ exhibited large saturation magnetization 4/spl pi/M/sub s/ and perpendicular anisotropy constant K/sub /spl perp// of 5.1 kG and 3.3/spl times/10/sup 5/ J/m/sup 3/, respectively. The results on plasma diagnosis and the dependences of interplanar distance and 4/spl pi/M, on the substrate temperature T/sub s/ imply that a number of Fe/sup 2+/ ions exist in the films. The crystal structure analysis by XRD suggests that the films contain Ba ferrite crystallites with additional S-blocks.