Quasi-microwave-range inductors covered with Co-based magnetic thin films

摘要

Quasi-micro-wave-range inductors have been studied, in which conductors are covered with Co-based magnetic thin films, such as Co-Pd-Si-O granular film and Co-Nb-Zr amorphous film. For the inductor with Co-Pd-Si-O film, the inductance at GHz range was expected to be higher than that of inductor with Co-Nb-Zr film. It is supposed that large magnetization exceeds 10 kG and large anisotropy exceeds 100 Oe of Co-Pd-Si-O film and causes high resonance frequency.