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Normal incidence polarization interferometer for measuring flying height of magnetic heads

机译:法向入射极化干涉仪,用于测量磁头的飞行高度

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摘要

In this paper, we give a brief review and analysis to the two currently most powerful methods for flying height testing of magnetic heads-intensity interferometry and polarization interferometry. Then a dual-beam normal incidence polarization interferometry method is proposed to compromise the disadvantages of the above two methods. The proposed method not only has the advantages of both the above methods, but also can be used to measure the pitch and roll of the head-slider dynamically. Design details and analysis of the relationship between the optical parameters of the tester and its testing accuracy are given.
机译:在本文中,我们简要回顾和分析了目前两种最有效的磁头飞行高度测试方法-强度干涉测量法和极化干涉测量法。然后提出了一种双光束法向入射偏振干涉法,以克服上述两种方法的缺点。所提出的方法不仅具有上述两种方法的优点,而且可以动态地测量磁头滑块的俯仰和侧倾。给出了设计细节,并对测试仪的光学参数与其测试精度之间的关系进行了分析。

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