Soft Anisotropic Fe{sub}65Co{sub}35/Co Thin Films Prepared by Facing Targets Sputtering

摘要

High saturation magnetization FeCo(Fe{sub}65Co{sub}35) /Co films with 4πM{sub}s about 24 kG were prepared by facing targets sputtering (FTS). A well-defined in-plane uniaxial anisotropy and excellent soft magnetic properties were obtained with a hard axis coercivity of H{sub}(ch) = 3 Oe by inserting a thin Co underlayer. The X-ray diffractometry (XRD) results indicate that the Co underlayer changed the main diffraction line from (200) in the FeCo single layer to (110) in the FeCo/Co films. The Co underlayer significantly reduced the average grain size from ～74 nm for FeCo single layer to ^8.2 nm for FeCo/Co films. A smoother surface and a narrower grain size distribution were observed in FeCo/Co films.