In Situ Poly Heater—A Reliable Tool for Performing Fast and Defined Temperature Switches on Chip

摘要

In this paper, we discuss the calibration procedure and performance of the poly-heater measurement technique for device characterization and reliability issues. We put a particular emphasis on the accessible temperature range, the heating and cooling dynamics, as well as on the impact of temperature gradient between the heater, device, and thermo chuck. In this context, the poly-heater technique provides a reliable solution for fast and arbitrary temperature switches and offers the possibility to reach device temperatures that are far beyond the operating range of conventional thermo-chuck systems.