Monolithically integrated waveguide-MSM detector-HEMT amplifier receiver for long-waveguide lightwave systems

摘要

The first demonstration is reported of a long-wavelength receiver that monolithically integrates an InGaAsP waveguide, an InAlAs-InGaAs metal-semiconductor-metal (MSM) detector, and an InAlAs-InGaAs high-election-mobility transistor (HEMT) amplifier. External responsivities in response to a guided signal of 0.43 and 0.5 A/W were recorded, respectively for a 150- and a 300- mu m-long detector integrated with an InGaAsP waveguide. This corresponds to an internal quantum efficiency of about 95% after taking account of the combined external losses such as insertion loss between waveguide and fiber and propagation loss in the waveguide. A pulse response of 200 ps. corresponding to a bandwidth of about 820 MHz, was measured at the output of the HEMT amplifier. The receiver represents a major advance toward achieving high-performance integrated receiving components for long-wavelength lightwave systems.