Two-dimensional matrix addressed vertical cavity top-surface emitting laser array display

摘要

We present the design, fabrication, and demonstration of a 10/spl times/10 matrix-addressed vertical-cavity top-surface-emitting laser (VCSEL) array. These arrays are batch-fabricated from full 3-in diameter GaAs/AlGaAs wafers. We show that no performance-penalty is paid using top-contacted matrix addressed pixels over conventional planar VCSEL devices. A computer-controlled display system for electrically addressing the array was designed and constructed to permit video demonstration and array testing.