Mach-Zehnder ridge waveguide modulators on c/sup +/-LiNbO/sub 3/ by proton-exchange wet etch and nickel indiffusion are fabricated for the first time. Modulators operating at 0.633 /spl mu/m and 1.31 /spl mu/m are both produced, and the half-wave voltages are measured to be 4 V and 22.5 V, respectively, for an electrode length of 6 mm. The extinction ratios are 14 dB and 13.2 db, respectively, and can be improved by forming the ridge structure only at the electrode interaction region instead. These results make the wet-etched LiNbO/sub 3/ optical devices promising to take over the dry-etched ones in the near future.
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机译:首次通过质子交换湿法刻蚀和镍扩散制造了c / sup +/- LiNbO / sub 3 /上的Mach-Zehnder脊形波导调制器。均产生了工作在0.633 / spl mu / m和1.31 / spl mu / m的调制器,对于6 mm的电极长度,半波电压的测量值分别为4 V和22.5V。消光比分别为14 dB和13.2 db,并且可以通过仅在电极相互作用区域形成脊结构来提高消光比。这些结果使得湿法蚀刻的LiNbO / sub 3 /光学器件有望在不久的将来取代干法蚀刻的器件。
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