Athermal Arrayed-Waveguide Grating Multi/Demultiplexers Composed of TiO_(2)-SiO_(2) Waveguides on Si

摘要

We have successfully demonstrated a novel athermal arrayed-waveguide grating (AWG), which is composed of highly TiO_(2)-doped SiO_(2) glass rib waveguides on a silicon substrate. We found that the wavelength temperature coefficients of the athermal AWG depend not only on the TiO_(2) concentration but also on the annealing temperature after fabrication. We obtained a center wavelength temperature coefficient of 0.7 pm/℃ at a TiO_(2) concentration of 66 mol% and an annealing temperature of 900℃.