Very High-Responsivity Evanescently Coupled Photodiodes Integrating a Short Planar Multimode Waveguide for High-Speed Applications

摘要

We report an evanescently coupled photodiode that utilizes a short planar multimode waveguide. Very high responsivity (>1 A/W) with polarization dependence less than 0.5 dB, 48-GHz bandwidth, and 11-mA saturation current were achieved.