This paper presents recent results for aberration correction and beam steering experiments using polysilicon surface micromachined piston micromirror arrays. Microfabricated deformable mirrors offer a substantial cost reduction for adaptive optic systems. In addition to the reduced mirror cost, microfabricated mirrors typically require low control voltages (less than 30 V), thus eliminating high-voltage amplifiers. The greatly reduced cost per channel of adaptive optic systems employing microfabricated deformable mirrors promise high-order aberration correction at low cost. Arrays of piston micromirrors with 128 active elements were tested. Mirror elements are on a 203-/spl mu/m 12/spl times/12 square grid (with 16 inactive elements, four in each corner of the array). The overall array size is 2.4 mm square. The arrays were fabricated in a commercially available surface micromachining process. The cost per mirror array in this prototyping process is less than $200. Experimental results are presented for a hybrid correcting element comprised of a lenslet array and piston micromirror array, and for a piston micromirror array only. Also presented is a novel digital deflection micromirror that requires no digital to analog converters, further reducing the cost of adaptive optics systems.
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机译:本文介绍了使用多晶硅表面微加工活塞微镜阵列进行像差校正和光束转向实验的最新结果。微型可变形反射镜可大幅降低自适应光学系统的成本。除了降低反射镜成本外,微型反射镜通常还需要低控制电压(低于30 V),从而省去了高压放大器。采用微制造的可变形反射镜的自适应光学系统的每通道成本大大降低,有望以低成本进行高阶像差校正。测试了具有128个有源元件的活塞微镜阵列。镜像元素位于203- / spl mu / m 12 / spl次/ 12正方形网格上(具有16个非活动元素,在阵列的每个角中有四个)。整个阵列的大小为2.4平方毫米。所述阵列以可商购的表面微加工工艺制造。在该原型制作过程中,每个反射镜阵列的成本不到200美元。给出了由小透镜阵列和活塞微镜阵列组成的混合校正元件的实验结果,并且仅针对活塞微镜阵列。还提出了一种不需要数模转换器的新型数字偏转微镜,从而进一步降低了自适应光学系统的成本。
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