Standing-wave Fourier transform spectrometer based on integratedMEMS mirror and thin-film photodetector

摘要

We report a novel, miniature Fourier transform spectrometer with anlinear architecture that works by sampling a standing wave. Thenspectrometer consists of an electrostatically actuatednmicroelectromechanical mirror with on-resonance displacement of up to 65nΜm, a thin-film photodetector, and an electrical back plane fornactuating the mirror. The integrated device offers mirror stability andnfixed relative alignment of the three components. The spectrometer hasnbetter than 32-nm resolution at 633 nm