A Bio–Fluidic–Photonic Platform Based on Deep UV Modification of Polymers

摘要

We present a review of our work on deep UV (DUV) modification of methacrylate-based polymers. This technology serves as a platform for realizing planar and ridge waveguide-based devices, fluidic channels, and enables the patterning of living cells including neural cells in vitro. Details on the DUV chemistry and fabrication technologies including hot embossing of multimode interference couplers will be given