Design considerations for the IBM X-ray lithography facility

摘要

Synchrotrons, like other large particle accelerators, have historically been the tools of universities and national laboratories for research. Moving this technology to industry presents many challenges which do not exist in an academic environment. One major challenge is to develop a facility to house and support the ring in a manufacturing-like mode where operator, customer, and public concern for radiation and industrial safety is of extreme importance. This paper describes IBM's efforts to design and build a facility to address these safety concerns.