Smart manufacturing in the sub-fab combines realtime data with specific domain knowledge to optimize equipment performance. Improved performance enables significant improvements in productivity and yield. A successful implementation of smart manufacturing requires that sub-fab vacuum and abatement systems be treated as a whole as well as individually. Application of big data techniques, data mining, artificial intelligence and machine learning will certainly reveal new relationships within the data, especially as the number and types of sensors grows and data is integrated across the fab, sub-fab and entire manufacturing ecosystem. Operational excellence models will provide the safe and solid foundations needed to realize the full benefits of new learning.
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