Continuously stable selfoscillation of silicon cantilever microresonators (for fibre optic sensors)

摘要

The continuously stable selfoscillation of silicon cantilever microresonators (SCMRs) has been observed. A theoretical analysis has been presented which explains how this phenomenon may be used for developing a practical sensor system. It has been pointed out that SCMRs have a much greater optical-mechanical transformation coefficient compared with silicon bridge microresonators, resulting in a considerable increase in the time selfoscillation is sustained and substantially greater misalignment error tolerance between the fibre end and the SCMR surface.