Contact potential measurement of cleaved mirror surface of 1.3 /spl mu/m buried heterostructure laser diode by Kelvin probe force microscopy

摘要

Contact potential images of a cleaved mirror surface of a 1.3 /spl mu/m buried heterostructure laser diode by Kelvin probe force microscopy have been successfully obtained. The embedded current blocking layer and mesa-etched active region were clearly recognised.