Anodization of Al_3Zr intermetallic compound film and its application to the preparation of thin-film capacitors with high reliability

摘要

By using stoichiometric, low-resistivity intermetallic compound composed of valve metals, it is expected that anodized capacitors with high heat resistance and high reliability can be realized. We therefore prepared a stoichiometric Al_3Zr film by co-sputtering an Al-Zr com- posite target, and the electrical properties of the Al_3Zr anodized capacitor were compared with those of Al_3Hf capacitor from the viewpoints of reduction of oxide thick- ness and heat tolerance.