Development of Two-Axis Electromagnetic Driving MEMS Mirror

摘要

We propose a new two-axis electromagnetic scanning mirror that utilizes radial magnetic fields. By positioning magnets under the mirror, we were able to develop a greatly miniaturized mirror device. This device's volume is 300 mm3. Moreover, the mirror driving magnetic induction can be enlarged by forming a closed magnetic field with the yoke and the magnets. To assemble it easily, the upper part of all magnets was assumed to be the N pole. To optimize the composition of the yoke and the magnets, the magnetic induction of the space was calculated by magnetic simulation. We made the mirror by the bulk micromachining process, and performed a drive experiment. The mirror scanning angle was 10° at 100 mA_(P-P) for a resonant frequency of 6 kHz, and the frame scanning angle was 1 degree at 100 mAp.p for a nonresonant frequency of 60 Hz. The calculation and measurement results were almost the same.