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摘要

Even for the moment putting aside multitouch sensing, the growth in sensor development has been meteoric. In this roundup we examines the latest developments, first in MEMS-related sensor design and then in sensors based on other technologies. Fully automotive qualified, the MLX90807 and MLX90808 fully integrated, relative and absolute pressure sensor die from Melexis have die realized with CMOS technology combined with MEMS bulk micromachining. Each consists of a silicon membrane with piezoresis-tors to transform the stress induced by pressure into an electrical signal.
机译:即使暂时搁置多点触摸感应,传感器开发的增长也已飞速发展。在本综述中,我们研究了最新的发展,首先是与MEMS相关的传感器设计,然后是基于其他技术的传感器。 Melexis的MLX90807和MLX90808完全集成,相对和绝对压力传感器芯片完全符合汽车技术要求,其芯片采用CMOS技术与MEMS批量微加工相结合而实现。每个组件都由带有压敏电阻的硅膜组成,可将压力引起的应力转换成电信号。

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